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Preliminary Datasheet
SLQ-HC60
Milliliter Flow Meter for Hydrocarbons
www.sensirion.com November 2008 Preliminary Information _ V0.81 1/6
1 Introduction SLQ-HC60
The SLQ-HC60 Liquid Flow Meter enables fast, non invasive measurements of liquid flow up to 80 ml/min. This
product line is especially suited for process monitoring applications in automation technology which require high
sensitivity in the milliliter range. It is suited for use with almost all hydrocarbons, as for example, alcohols, oils,
gasoline, diesel, etc. and many other chemicals. Excellent chemical resistance is ensured: The flow path of the SLQHC60
Liquid Flow Meters is formed by a simple, straight glass capillary. This Swiss made, non invasive flow meter is
based on Sensirion’s patented CMOSens® Technology (US Patent 6,813,944 B2). An internal fourth generation
MEMS sensor chip combines a thermal high precision sensor element with amplification circuits and digital
intelligence for linearization and temperature compensation on one single microchip – the product’s core element.
2 Sensing Performance
In Table 1 the flow sensor’s performance for use with Isopropyl Alcohol (IPA) is given. For other hydrocarbons the
values will be slightly different as the performance depends on the medium used. Due to the optimized output signal
the repeatability is nearly constant over a wide flow range. The repeatability depends on the integration timea of the
analog signal acquisition. Longer integration time leads to better repeatability of the flow measurement (see table 1).
The temperature compensation is optimized for use with IPA and shows very good performance for most
hydrocarbons and other media.
Table 1: Model specific performance of SLQ-HC60 for IPA (all data at 20°C, 1 barabs unless otherwise noted)
Parameter Condition SLQ-HC60 Units
Best Performance 80
Maximum Flow Rate
Reduced Performance 100
ml/min
1.5 % m.v.
0.2 sec integration time
0.2 % F.S.
1 % m.v.
Repeatabilityb
(whichever is greater)
2 sec integration time
0.07 % F.S.
Flow Detection Response Time < 50 ms
Accuracyc 10 % m.v.
Response Time On Power-Up 120 ms
Mounting Orientation Sensitivityd For IPA 0.25 ml/min
Temperature Compensated +10…+40 °C
Operating Temperature
Functional +0 ... +55 °C
Ambient storage temperature (empty flow channel) -10…+60 °C
a This refers to the time over which the analog acquisition device averages the input signal. Refer to the datasheet of your
device.
b For medium IPA using 1 σ standard deviation of consecutive flow measurements.
c With IPA, 2.5-80 ml/min, after conversion of the Vout signal via the logarithmic relation.
d Normal position: Horizontal Flow channel, connector horizontally.
- Maximum flows up to 80 ml/min
- Sensitive to lowest flows
- Straight flow path, no moving parts
- Fast response time: < 50 ms
- Optimized for hydrocarbons
-
SLQ-HC60 Milliliter Flow Sensor
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3 Output Signal and Media
Compatibility
3.1 Output Signal
The SLQ-HC60 flow meter comes with
an analog output (0…10V). Depending
on the media used, the output will be
about 5 Volt at zero flow. For positive
flow rates the output signal increases
logarithmicallya with the flow rate for
IPA (see figure 1). This signal
characteristic has the advantage that
the flow meter can be used at various
flow rates with a constant relative error
and makes measurements for a wide
spectrum of liquids possible.
3.2 Signal for Other Media
For other media but IPA the form of the
sensor signal will differ slightly as is
demonstrated in figure 2. When using
the sensor with other media but IPA,
ask Sensirion for advice on how to
handle the sensor signal to suit your
requirements.
Because of the drastically different
sensor response the sensor is not
suited for use with water or aqueous
solutions.
3.3 Maximum Flow Rate for Common Media
Due to the measurement principle, the thermal
properties of the medium determine the sensor
characteristics and the dynamic range of the device.
For most hydrocarbons and most other media this
range extends to about 80 ml/min. With reduced
performance even rates of 100 ml/min or higher can
be reached for some media. For low viscosity (< 1
centipoise) media the dynamic range can be limited
by turbulence.
The dynamic ranges for various media are given in
Table 2. For other media similar values can be
expected.
Attention: If unsure about your medium please contact Sensirion for assistance.
a The flow rate for IPA is given by Flow[ml/min] = (Exp[(Vout-5)/0.729]-1)/3 for positive flow rates, i.e. above 5V.
b At reduced requirements on accuracy (repeatability for other media but IPA) and exchangeability of sensors.
Table 2: Examples for common media
Medium Maximum Flow Rate Units
IPA 80 (100b)
Ethanol, Methanol ~50
Acetone ~ 40
Diesel, Petroleoum 80 (100d)
Gasoline ~50
Vegetable Oil 80 (100d)
Silicon Oil, Ether < 100
ml/min
Figure 1: Sensor Signal for IPA
0
1
2
3
4
5
6
7
8
9
10
-120 -100 -80 -60 -40 -20 0 20 40 60 80 100 120
Flow [ml/min] (IPA)
Vout [Volt]
Figure 2: Sensor Signal for Various Media
5
6
7
8
9
10
0 20 40 60 80 100
Flow [ml/min]
Vout [Volt]
Ethanol
IPA
Diesel
SLQ-HC60 Milliliter Flow Sensor
www.sensirion.com November 2008 Preliminary Information _ V0.81 3/6
3.4 Exchangeability
Every SLQ-HC60 is calibrated for IPA. This makes the sensors also exchangeable for use with other media, meaning
that once the sensors are characterized for a particular medium the same values can be used for further sensors.
Depending on the media, variations between sensors of 6– 20% are typical.
4 Cleaning
Due to the measurement principle the sensor is sensitive to deposits on the inside of the sensor’s capillary.
Especially when changing from one liquid to another sufficient cleaning steps have to be performed to avoid nonsoluble
remainders on the capillary wall. Inadequate cleaning can lead to an offset and low repeatability. The
cleaning procedure has to efficiently remove contaminations from the borosilicate glass surfaces. This is the material
which is used for the straight flow channel inside the flow meter.
Any form of mechanical cleaning has to be avoided. This will easily damage the internal capillary.
5 Electrical and Mechanical Specifications
5.1 Electrical Specifications
Table 2: DC Characteristics.
Parameter Conditions Min. Typ. Max. Units
Power Supply DC, VDD 16 24 26 V
Operating Current VDD = 24 V ---- , no load 3 4 mA
Analog Out Voltage Range 0 10 V
Load at Analog Out 10 ¥ kW
Capacitive Load at Analog out Tbd pF
5.2 Electrical Connector and Pinout
Connector Type: Lumberg Pico (M8) male, 8-pole, threaded lock.
Pin Color (pigtail cable)
1 Power Supply 24V white
2 GND brown
3 GND green
4 GND yellow
5 GND gray
6 Analog Out 0-10 V pink
7 GND blue
8 GND red
5.3 Fluidic Connections
The repeatability of the measurement depends on a laminar flow of the liquid. Especially with low viscosity media
improper connections to the sensor can unnecessarily reduce the maximum flow rate. Tubing with an inner diameter
of less than 1.8 mm should be avoided. Make sure that the tubing has been cut properly.
SLQ-HC60 Milliliter Flow Sensor
www.sensirion.com November 2008 Preliminary Information _ V0.81 4/6
5.4 Mechanical Specifications and Pressure Rating
Table 3: Mechanical Specifications and Pressure Rating
Parameter SLQ-HC60
Fluid Connector Standard (Fittings) ¼-28 flat bottom port for 1/8”, 3mm OD tubing
Wetted Materials:
· Internal Sensor Capillary Material Duran® (borosilicate glass 3.3)
· Fitting Material 100% PEEK™ (polyetheretherketone)
· Additional Sealing Material Tefzel® (ETFE)
Overpressure Resistance
3 bar
45 psi
Maximum Pressure Drop
(at 80 ml/min flow rate for IPA)
40 mbar
Internal Sensor Capillary, Inner Diameter 1.8 mm
Protection Class IP 65
Total Mass 53 g
6 Physical Dimensions
7 Ordering Info
Product Article Number
SLQ-HC60 1-100605-01
Attention
Mechanical shocks and connecting to the fittings with excessive force can lead to stress on the internal
thin walled glass capillary and can cause it to break. Test for leakage after every time new connections
are made.
Refer to Handling Instructions for precise information. !
SLQ-HC60 Milliliter Flow Sensor
www.sensirion.com November 2008 Preliminary Information _ V0.81 5/6
Important Notices
7.1 Warning, personal injury
Do not use this product as safety or emergency stop
devices or in any other application where failure of the
product could result in personal injury. Do not use this
product for applications other than its intended and
authorized use. Before installing, handling, using or
servicing this product, please consult the data sheet
and application notes. Failure to comply with these
instructions could result in death or serious injury.
If the Buyer shall purchase or use SENSIRION products for
any unintended or unauthorized application, Buyer shall
defend, indemnify and hold harmless SENSIRION and its
officers, employees, subsidiaries, affiliates and distributors
against all claims, costs, damages and expenses, and
reasonable attorney fees arising out of, directly or
indirectly, any claim of personal injury or death associated
with such unintended or unauthorized use, even if
SENSIRION shall be allegedly negligent with respect to the
design or the manufacture of the product.
7.2 ESD Precautions
The inherent design of this component causes it to be
sensitive to electrostatic discharge (ESD). To prevent ESDinduced
damage and/or degradation, take customary and
statutory ESD precautions when handling this product.
See application note “ESD, Latchup and EMC” for more
information.
7.3 Warranty
SENSIRION warrants solely to the original purchaser of
this product for a period of 12 months (one year) from the
date of delivery that this product shall be of the quality,
material and workmanship defined in SENSIRION’s
published specifications of the product. Within such period,
if proven to be defective, SENSIRION shall repair and/or
replace this product, in SENSIRION’s discretion, free of
charge to the Buyer, provided that:
· notice in writing describing the defects shall be
given to SENSIRION within fourteen (14) days
after their appearance;
· such defects shall be found, to SENSIRION’s
reasonable satisfaction, to have arisen from
SENSIRION’s faulty design, material, or
workmanship;
· the defective product shall be returned to
SENSIRION’s factory at the Buyer’s expense; and
· the warranty period for any repaired or replaced
product shall be limited to the unexpired portion of
the original period.
This warranty does not apply to any equipment which has
not been installed and used within the specifications
recommended by SENSIRION for the intended and proper
use of the equipment. EXCEPT FOR THE WARRANTIES
EXPRESSLY SET FORTH HEREIN, SENSIRION MAKES
NO WARRANTIES, EITHER EXPRESS OR IMPLIED,
WITH RESPECT TO THE PRODUCT. ANY AND ALL
WARRANTIES, INCLUDING WITHOUT LIMITATION,
WARRANTIES OF MERCHANTABILITY OR FITNESS
FOR A PARTICULAR PURPOSE, ARE EXPRESSLY
EXCLUDED AND DECLINED.
SENSIRION is only liable for defects of this product arising
under the conditions of operation provided for in the data
sheet and proper use of the goods. SENSIRION explicitly
disclaims all warranties, express or implied, for any period
during which the goods are operated or stored not in
accordance with the technical specifications.
SENSIRION does not assume any liability arising out of
any application or use of any product or circuit and
specifically disclaims any and all liability, including without
limitation consequential or incidental damages. All
operating parameters, including without limitation
recommended parameters, must be validated for each
customer’s applications by customer’s technical experts.
Recommended parameters can and do vary in different
applications.
SENSIRION reserves the right, without further notice, (i) to
change the product specifications and/or the information in
this document and (ii) to improve reliability, functions and
design of this product.
Copyright© 2001-2007, SENSIRION.
CMOSens® is a trademark of Sensirion
All rights reserved.
Trademarks where mentioned. E.g.
PEEK™ is a trademark of Victrex PLC
Teflon® is a registered trademark of DuPont Corporation
Duran® is a trademark of the SCHOTT-Group
FCC and CE Statement
This product has been tested and found to comply with the
limits for a Class B digital device, pursuant to part 15 of the
FCC Rules (FCC CFR 47). These limits are designed to
provide reasonable protection against harmful interference
in a residential installation. This equipment generates, uses
and can radiate radio frequency energy and, if not installed
and used in accordance with the instructions, may cause
harmful interference to radio communications. However,
there is no guarantee that interference will not occur in a
particular installation. If this equipment does cause harmful
interference to radio or television reception, which can be
determined by turning the equipment off and on, the user is
encouraged to try to correct the interference by one of
more of the following measures:
SLQ-HC60 Milliliter Flow Sensor
www.sensirion.com November 2008 Preliminary Information _ V0.81 6/6
· Reorient or relocate the receiving antenna.
· Increase the separation between the equipment
and the receiver
· Connect the equipment into an outlet on a circuit
different from that to which the receiver is
connected.
· Consult a dealer or an experienced radio/TV
technician for help.
The devices fully comply with norm EN 50081-2 (Emission
Test Series) as well as EN 50082-2 (Immunity Test Series).
ESD protection up to 2kVolt.
7.4 RoHS and WEEE Statement
The SLQ product family complies with requirements of the
following directives:
· EU Directive 2002/96/EC on waste electrical and
electronic equipment(WEEE), OJ13.02.2003; esp.
its Article 6 (1) with Annex II.
· EU Directive 2002/95/EC on the restriction of the
use of certain hazardous substances in electrical
and electronic equipment (RoHS), OJ 13.02.2003;
esp. its Article 4.
Headquarters and Sales Office
Headquarter Sales Office USA:
SENSIRION AG Phone: + 41 (0)44 306 40 00 SENSIRION Inc. Phone: 805 409 4900
Laubisruetistr. 50 Fax: + 41 (0)44 306 40 30 2801 Townsgate Rd., Suite 240 Fax: 805 435 0467
CH-8712 Staefa ZH
info@sensirion.com Westlake Village, CA 91361
michael.karst@sensirion.comSwitzerland
http://www.sensirion.com/ USA
http://www.sensirion.com/Sales Office Korea: Sales Office Japan:
SENSIRION KOREA Co. Ltd. Phone: 031 440 9925~27 SENSIRION JAPAN Co. Ltd. Phone: 03 3444 4940
#1414, Anyang Construction Tower B/D, Fax: 031 440 9927 Postal Code: 108-0074 Fax: 03 3444 4939
1112-1, Bisan-dong, Anyang-city
info@sensirion.co.kr Shinagawa Station Bldg. 7F,
info@sensirion.co.jpGyeonggi-Province
http://www.sensirion.co.kr/ 4-23-5, Takanawa, Minato-ku
http://www.sensirion.co.jpSouth Korea Tokyo, Japan
Find your local representative at:
http://www.sensirion.com/en/06_contact-sales/00_contact_us/02_representatives.htm
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